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Mattson Technology Introduces New Helios XL
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Monday, July 16, 2012:
Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today introduced Helios XL, its latest rapid thermal processing (RTP) system designed to help customers achieve high transistor performance and improved device yields at the lowest cost of ownership (CoO) for advanced logic manufacturing.
Featuring differential thermal energy control (DTEC), this newest addition joins the company's production-proven Helios and Helios XP family to provide a cost-effective rapid thermal annealing (RTA) solution for advanced thermal applications down through the 14 nanometer (nm) technology node and beyond.
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"The introduction of Helios XL reinforces Mattson Technology's commitment to deliver high-performance, technology and productivity systems to our customers," said Johannes Keppler, business leader of Mattson Technology's Thermal Products Group. "Helios XL features the DTEC heating scheme that successfully addresses pattern loading effects for leading-edge chip structures and enables our customers to overcome technological challenges without sacrificing reliability or productivity."
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